Serial Number:
76634075
Mark:
LUMENA
Status:
Abandoned-Failure to Respond
Status Date:
05-19-2006
Filing Date:
Registration Number:
N/A
Registration Date:
N/A
optical metrology product that provides an accurate measurement of the Numerical Aperture of a lithography tool and variation of same across the stepper or scanner exposure field, by utilizing an instrument that fits in a standard reticle/pellicle envelope, and a software package that processes the wafer images
Mark Description:
N/A
Class:
Scientific
Type of Mark:
Trademark
Published for Opposition Date:
N/A
Owner:
Mark Drawing Status:
Standart Character Mark
Abandon Date:
04-24-2006
Business Name:
N/A
Correspondent Name:
